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Carbon vapor deposition furnace

Carbon vapor deposition furnace
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Technical parameters:

Door: hinge return / trolley shift; manual locking / automatic locking

Shell: all carbon steel / inner stainless steel / all stainless steel

Furnace gallbladder: soft carbon felt / soft graphite felt / hard composite felt

Heater, muffle: isostatic graphite / three high graphite mould

Process gas system: Volume / mass flowmeter; manual valve / automatic valve; import / domestic

Vacuum pump and vacuum gauge: import / homemade

Man-machine interface: analog screen / touch screen / industrial computer

PLC: OMRON / SIEMENS

Temperature control instruments: shimaden /eurotherm /

Thermocouple: C/S/K/N indexing number

Recorder: paperless recorder / paper recorder; import / homemade

Electrical components: CHINT / Schneider / SIEMENS

Skip: raceway / forklift / stacked long transmission vehicle

Specification:

Model

VHS-40/40/80-1500CVD

VHS-80/80/120-1500CVD

VHS-100/100/150-1500CVD

VHS-120/120/250-1500CVD

Workspace

W×H×Lmm

400×400×800

800×800×1200

1000×1000×1500

1200×1200×2500

Max temp

1500

1500

1500

1500

Temp uniformity

±7.5

±7.5

±7.5

±10

Ultimate vacuum degreePa

50

50

50

50

Pressure rise ratePa/h

3

3

3

3

Contact

Telphone: +86-21-51095287

Email: haoyue@haoyue-group.com

Add:NO.1100,Hanggui Road,Jiading District,Shanghai City,China